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Axcelis Technologies, Inc.
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l rubin88 Publications594 Citations
carlo waldfried62 Publications1836 Citations
victor m benveniste60 Publications282 Citations
peter l kellerman56 Publications141 Citations
aditya agarwal51 Publications1214 Citations
ivan berry50 Publications1191 Citations
michael graf46 Publications165 Citations
bo h vanderberg41 Publications158 Citations
orlando escorcia35 Publications1393 Citations
william f divergilio26 Publications99 Citations
john w vanderpot25 Publications291 Citations
douglas brown25 Publications153 Citations
aseem srivastava25 Publications199 Citations
qingyuan han23 Publications984 Citations
edward c eisner23 Publications64 Citations
brian scott freer21 Publications63 Citations
robert d rathmell20 Publications94 Citations
yongzhang huang18 Publications173 Citations
shijian luo17 Publications171 Citations
neil k colvin17 Publications20 Citations
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