With the analysis among 77 patents, we discovered top 38 key players by total patent application. Nanometrics, Inc., FEI, Inc., Etec Systems, Inc. are dominant in this area. They take 27.27% of the total patent filing.
California, United States
Patent: 9
Tennessee, United States
Patent: 7
California, United States
Patent: 5
Hitachi High-Tech America, Inc.
Illinois, United States
Patent: 4
California, United States
Patent: 3
Taiwan Province, China
Patent: 2
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With the analysis among related 3 patents applied in the last 5 years. We discover 2 most active companies in this area.
Sichuan Sheng, China
Patent: 1
With the analysis among related 3 patents in last 5 years, we discover 2 new entrants.
Sichuan Sheng, China
Patent: 1
With the analysis among 12 patents, we discovered top 6 universities and scientific research institutions by total patent application. Nagoya Institute of Technology, Tsinghua University, Massachusetts Institute of Technology are dominant in this area. They take 75.00% of the total patent filing.
Aichi-ken, Japan
Patent: 3
Beijing Shi, China
Patent: 2
Massachusetts, United States
Patent: 1
Beijing Shi, China
Patent: 1
Sichuan Sheng, China
Patent: 1